CH646032GA3 - - Google Patents

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Publication number
CH646032GA3
CH646032GA3 CH224782A CH224782A CH646032GA3 CH 646032G A3 CH646032G A3 CH 646032GA3 CH 224782 A CH224782 A CH 224782A CH 224782 A CH224782 A CH 224782A CH 646032G A3 CH646032G A3 CH 646032GA3
Authority
CH
Switzerland
Prior art keywords
projections
photochemical
working
fracture
resonator element
Prior art date
Application number
CH224782A
Other languages
English (en)
French (fr)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to CH224782A priority Critical patent/CH646032GA3/fr
Priority to JP58038412A priority patent/JPS58179013A/ja
Priority to EP83810140A priority patent/EP0092515A1/fr
Publication of CH646032GA3 publication Critical patent/CH646032GA3/fr

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
CH224782A 1982-04-14 1982-04-14 CH646032GA3 (en])

Priority Applications (3)

Application Number Priority Date Filing Date Title
CH224782A CH646032GA3 (en]) 1982-04-14 1982-04-14
JP58038412A JPS58179013A (ja) 1982-04-14 1983-03-10 圧電共振素子とその製造方法
EP83810140A EP0092515A1 (fr) 1982-04-14 1983-04-08 Elément résonateur piézoélectrique et procédé de fabrication de celui-ci

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH224782A CH646032GA3 (en]) 1982-04-14 1982-04-14

Publications (1)

Publication Number Publication Date
CH646032GA3 true CH646032GA3 (en]) 1984-11-15

Family

ID=4229306

Family Applications (1)

Application Number Title Priority Date Filing Date
CH224782A CH646032GA3 (en]) 1982-04-14 1982-04-14

Country Status (3)

Country Link
EP (1) EP0092515A1 (en])
JP (1) JPS58179013A (en])
CH (1) CH646032GA3 (en])

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0422567Y2 (en]) * 1985-12-28 1992-05-25
JPH0298522U (en]) * 1988-04-06 1990-08-06
EP0596522A1 (en) * 1992-11-06 1994-05-11 AVANCE TECHNOLOGY, Inc. High frequency crystal resonator
US5487211A (en) * 1993-08-19 1996-01-30 Motorola, Inc. Method for fabricating a surface-mountable crystal resonator
JP4735648B2 (ja) * 2001-10-16 2011-07-27 セイコーエプソン株式会社 圧電振動片及びその加工方法
WO2004017789A1 (ja) 2002-07-30 2004-03-04 Yoshida Industry Co., Ltd. 収納ケース
JP4729924B2 (ja) * 2004-12-28 2011-07-20 エプソントヨコム株式会社 Ａｔカット水晶片集合体の製造方法
JP4830069B2 (ja) * 2005-11-15 2011-12-07 セイコーエプソン株式会社 圧電ウエハ
JP5158706B2 (ja) * 2008-06-30 2013-03-06 日本電波工業株式会社 水晶振動子の製造方法及び水晶振動子並びに電子部品
JP5251369B2 (ja) * 2008-09-03 2013-07-31 セイコーエプソン株式会社 圧電振動片の製造方法
JP5402031B2 (ja) * 2009-02-02 2014-01-29 セイコーエプソン株式会社 水晶振動片の加工方法及び水晶ウェーハ
JP5152542B2 (ja) * 2011-03-14 2013-02-27 セイコーエプソン株式会社 水晶ウエハの製造方法
JP6525766B2 (ja) * 2015-06-29 2019-06-05 京セラ株式会社 水晶振動素子集合ウエハ
JP7424065B2 (ja) * 2020-01-20 2024-01-30 セイコーエプソン株式会社 振動デバイス、電子機器、及び移動体

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49131088A (en]) * 1973-04-16 1974-12-16 Suwa Seikosha Kk
JPS5470791A (en) * 1977-11-17 1979-06-06 Citizen Watch Co Ltd Thin plate piezoelectric oscillator

Also Published As

Publication number Publication date
EP0092515A1 (fr) 1983-10-26
JPS58179013A (ja) 1983-10-20

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